三氟化氮 Detection
Formula NF₃ · CAS 7783-54-2 · 氧化性 / 强温室气体（GWP=17200）
Hazards & Toxic Symptoms
Nitrogen trifluoride is a colorless gas with a slight musty odor and is a strong oxidizer. It decomposes upon heating, releasing F₂ and NOx, which are highly toxic. It is also a potent greenhouse gas.
Occupational Exposure Limits (GBZ 2.1-2019)
| PC-TWA (Time-Weighted Average) | 29 mg/m³ |
|---|---|
| IDLH (Immediately Dangerous to Life or Health) | 1000 ppm |
⚠️ Actual alarm thresholds depend on on-site risk assessment. ⚙️ Use the GB Alarm Calculator →
Typical Application Scenarios
- Semiconductor chamber cleaning (alternative to PFC)
- TFT-LCD manufacturing
- Photovoltaic cell
Detection Principle / Recommended Sensors
Infrared (NDIR) / electrochemical sensor
Common Range：0-50 ppm
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