二氯二氢硅/二氯硅烷 Detection
Formula SiH₂Cl₂ · CAS 4109-96-0 · 自燃易爆硅化物
Hazards & Toxic Symptoms
Dichlorosilane/dichlorosilane is a silane compound that can spontaneously ignite in contact with air and reacts violently with water. It has a very wide explosion range. It is a core raw material for CVD deposition and silicon thin film manufacturing in the semiconductor/photovoltaic industry. It must be stored under inert gas protection, with all delivery pipelines made of welded stainless steel, and alarms and emergency shutoffs are activated immediately in case of leakage.
📋 General Reference
Information below is compiled from this factor's chemical category (自燃易爆硅化物). For specific exposure limits, monitoring plans, and sensor selection, please confirm with our engineers.
Typical Application Scenarios
- Semiconductor / Photovoltaic CVD Workshop
- TFT-LCD production
- Silicon-based new materials
Detection Principle / Recommended Sensors
Catalytic combustion / dedicated electrochemical sensor
Common Range：0-50 ppm
🤝 Custom Product in Progress
No off-the-shelf model yet, but we already have 二氯二氢硅/二氯硅烷 detection capability and support custom sensor configuration.