二氯氢硅 Detection
Formula SiH₂Cl₂ · CAS 4109-96-0 · 自燃易爆硅化物
Hazards & Toxic Symptoms
Dichlorosilane, a silane compound, is prone to spontaneous combustion when exposed to air and reacts violently with water. It has a very wide explosion range. It is a core raw material for CVD deposition and silicon thin film manufacturing in the semiconductor/photovoltaic industry. It must be stored under inert gas protection, with the delivery pipeline made of fully welded stainless steel, and any leakage will trigger an alarm for emergency shut-off.
📋 General Reference
Information below is compiled from this factor's chemical category (自燃易爆硅化物). For specific exposure limits, monitoring plans, and sensor selection, please confirm with our engineers.
Typical Application Scenarios
- Semiconductor / Photovoltaic CVD Workshop
- TFT-LCD production
- Silicon-based new materials
Detection Principle / Recommended Sensors
Catalytic combustion / dedicated electrochemical sensor
Common Range：0-50 ppm
🤝 Custom Product in Progress
No off-the-shelf model yet, but we already have 二氯氢硅 detection capability and support custom sensor configuration.