硅烷 Detection
Formula SiH₄ · CAS 7803-62-5 · 自燃性 / 极易爆 / 毒性
Hazards & Toxic Symptoms
Silane is a colorless gas with a pungent odor, which can spontaneously ignite when exposed to air. When mixed with air, it can explode if the concentration exceeds 1.4%. The vapor is toxic and irritating to the respiratory tract.
Occupational Exposure Limits (GBZ 2.1-2019)
| PC-TWA (Time-Weighted Average) | — |
|---|---|
| IDLH (Immediately Dangerous to Life or Health) | — |
| LEL (Lower Explosive Limit) | 1.4% |
| UEL (Upper Explosive Limit) | 96% |
⚠️ Actual alarm thresholds depend on on-site risk assessment. ⚙️ Use the GB Alarm Calculator →
Typical Application Scenarios
- Semiconductor/Photovoltaic Silicon Thin Film Deposition (CVD)
- TFT-LCD manufacturing
- Optical fiber
- Silicon-based new materials
Detection Principle / Recommended Sensors
Electrochemical dedicated / catalytic combustion
Common Range：0-50 ppm
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