三氯氢硅 Detection
Formula SiHCl₃ · CAS 10025-78-2 · 极易燃 / 强腐蚀
Hazards & Toxic Symptoms
Trichlorosilane is a colorless, flammable liquid (boiling point 32°C) that releases HCl when it comes into contact with water. Its vapor is flammable and has a wide explosion range. It is a core raw material in the semiconductor industry.
Typical Application Scenarios
- Polysilicon/monocrystalline silicon production
- Photovoltaic industry
- Semiconductor epitaxy (EPI)
Detection Principle / Recommended Sensors
Catalytic combustion / Infrared
Common Range：0-100% LEL
🤝 Custom Product in Progress
No off-the-shelf model yet, but we already have 三氯氢硅 detection capability and support custom sensor configuration.