Project Background

In the second phase of a newly-built 12-inch wafer fab in the Yangtze River Delta region, the special gas supply room utilizes over 60 types of specialty gases, including SiH₄ (silane), PH₃ (phosphine), AsH₃ (arsine), Cl₂, and HF. The new factory building is constructed in accordance with the SEMI S6-2024 standard, requiring 7×24 uninterrupted dual redundant monitoring with ppb-level response.

Customer Pain Points

  • SiH₄ is prone to spontaneous combustion (LEL 1.4%), and any leakage may trigger a fire
  • PH₃ / AsH₃ are highly toxic, with a lethal concentration of 0.3 ppm, requiring a ppb-level (0.001 ppm) response
  • Cl₂ / HF are highly corrosive, with just 1 ppm causing permanent damage to personnel
  • A single false alarm can trigger a complete plant shutdown, resulting in losses of up to tens of millions of yuan. Therefore, a low false alarm rate is essential.
  • Must comply with SEMI S6-2024 dual redundancy + interface with full protocol of EMS/FCS

URION Solutions

  • Multi-point redundancy in special gas room: Each type of special gas is equipped with 2 sets of independent sensors, with 2/3 voting to avoid false alarms
  • Three lines of defense: inside the cylinder cabinet + ceiling of the room + exhaust vent
  • PH₃ / AsH₃ ppb level: Customized electrochemical sensor, with a resolution of 0.001 ppm
  • SiH₄ Spontaneous Combustion Monitoring: 8 sets of customized sensors, with a range of 0-50 ppm
  • Cl₂ / HF High Sensitivity: 48 sets of electrochemical sensors
  • EFE / FFU Linkage: Triggering an early warning to automatically cut off the gas source + initiating emergency exhaust
  • EMS / FCS Protocol Integration: Full protocol support for Modbus / OPC UA / Profinet
  • AI Drift Self-diagnosis: Predict maintenance intervals based on historical data to avoid false alarms

Implementation Effect

  • 128 sets of electrochemical sensors + 64 sets of infrared sensors, covering all special gas supply points
  • SEMI S6-2024 dual redundancy audit successfully passed with 100% compliance
  • During the trial operation period in 2025, there were 0 false alarm incidents and 0 missed alarms.
  • EMS system integration, leakage response time < 5 seconds