四氟化碳 Detection

⚠️ Hazards & Toxic Symptoms

Carbon tetrafluoride (CF₄, also known as R-14, Halocarbon 14) is a colorless, odorless, and stable gas, inherently chemically inert, non-toxic, and non-flammable. Its main risks include: ① simple asphyxiation caused by oxygen displacement in enclosed spaces (hazardous when oxygen level is <19.5%); ② decomposition at high temperatures (>600°C, such as in electric arcs or flames) can produce highly toxic hydrogen fluoride (HF) and carbonyl fluoride (COF₂); ③ it is a potent greenhouse gas (GWP 7390, with an atmospheric lifetime of 50,000 years) and is one of the perfluorinated compounds (PFCs) regulated under the Kyoto Protocol. In the semiconductor industry, it is used as a dry etching gas. The primary detection method is the non-dispersive infrared (NDIR) method.

🏭 Typical Application Scenarios

• Semiconductor chamber etching (wafer manufacturing)
• TFT-LCD / Photovoltaic cell process
• Insulating gas for power equipment (mixed with SF₆)
• Freezer ultra-low temperature refrigerant (R-14)
• Tracer gas (pipeline leak detection)

🔬 Detection Principle / Recommended Sensors

Infrared (NDIR, main product) / Gas Chromatography

Common Range：0-1000 ppm